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Montana Microfabrication Facility
Nano Bobcat - click for more information
Nano Bobcat - click for more information

The electron microscope image is a standing silicon structure fabricated at MMF by using the Oxford ICP plasma etcher. The pattern was drawn into PMMA using the E-beam lithography system at ICAL.

The Electron microscope pictures was provided by David Weir, a member of Dr. Wataru Nakagawa's nano optics group here at MSU

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