Montana Microfabrication Facility

All Equipment

Deposition
Equipment	Associated Process(es)
Angstrom Sputter System	Aluminum thin film Chrome thin film Gold thin film Iron thin film Permalloy thin film Silicon Dioxide thin film Titanium thin film
Amod Evaporator	Aluminum thin film Chrome thin film Gold thin film Silicon Dioxide thin film Titanium thin film

Etching
Equipment	Associated Process(es)
Oxford ICP	Cryogenic etch
March 1703
PVA Tepla Ion 10	O2 Descum R1 S1813 on Si ashing R2 S1813 on Al Ashing R3 S1813 on Si Descum R4 S1813 on Al Descum

Lithography
Equipment	Associated Process(es)
YES III vapor prime oven	HMDS coating
AB-M contact aligner	Shipley SPR 1813 exposure
Solvent/Headway spinner bench	Spin Coating
EMS Hotplate
Brewer Cee 100CB	Spin Coating

Metrology
Equipment	Associated Process(es)
Ambios XP2	Step Height thickness measurement
Nanospec 3000

Packaging
Equipment	Associated Process(es)
K&S 4523AD wire bonder
Microautomation 1006 dicing saw

Wetbenches
Equipment	Associated Process(es)
Acid process wetbench
Oxidation diffusion wetbench	RCA clean for oxidation/diffusion

Miscellaneous
Equipment	Associated Process(es)
ATV PEO 603	Thermal Oxidation
MRL oxidation	Thermal Oxidation

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