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Montana Microfabrication Facility
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Equipment
Equipment
Associated Process(es)
ATV PEO 603
Deposition
Equipment
Associated Process(es)
Angstrom Sputter System
Chrome thin film
Gold thin film
Amod Evaporator
Chrome thin film
Etching
Equipment
Associated Process(es)
Oxford ICP
Cryogenic etch
March 1703
Lithography
Equipment
Associated Process(es)
AB-M contact aligner
Shipley SPR 1813 exposure
Solvent/Headway spinner bench
YES III vapor prime oven
HMDS coating
Metrology
Equipment
Associated Process(es)
Nanospec 3000
Ambios XP2
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Thin solid films
Transparent heaters based on solution-processed indium tin oxide nanoparticles
Growth and characterization of well-aligned densely-packed rutile TiO2 nanocrystals on sapphire (100) and (012) substrates by reactive magnetron sputtering
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