Montana Microfabrication Facility

All Equipment

Deposition
Equipment	Associated Process(es)
Angstrom Sputter System	Aluminum thin film Chrome thin film Gold thin film Iron thin film Permalloy thin film Silicon Dioxide thin film Titanium thin film
Amod Evaporator	Aluminum thin film Chrome thin film Gold thin film Silicon Dioxide thin film Titanium thin film
Modulab Evaporator	Aluminum thin film

Etching
Equipment	Associated Process(es)
Oxford ICP	Cryogenic etch
March 1703
PVA Tepla Ion 10	O2 Descum R1 S1813 on Si ashing R2 S1813 on Al Ashing R3 S1813 on Si Descum R4 S1813 on Al Descum

Lithography
Equipment	Associated Process(es)
AB-M contact aligner	Shipley SPR 1813 exposure
YES III vapor prime oven	HMDS coating
Solvent/Headway spinner bench	Spin Coating
EMS Hotplate