Please email Sierra at email@example.com for status or configuration updates.
|Angstrom Sputter System||Online||Config: mixed shields|
|EvoVac Evaporator||Online||Config: mixed shields|
7/22/2020: We are allowing users access to the tool. Use must be supervised for the immediate future, so please reserve the tool in advance and coordinate with staff.
7/1/2020: We got the new clamp ring installed, and have had the tool working. However, we have now had 3 random power failures. We are looking into a UPS for the tool, have contacted MSU facilities, and have started working on Oxford's troubleshooting procedures. Please email Andy if you have any questions.
5/29/2020: Tool was off and would not pump down. Ben and I decided it was an appropriate time to change the clamp ring and fix the other problems we saw on the tool.
|PVA Tepla Ion 10||Online|
|Packaging||Microautomation 1006 Dicing Saw||Online|
|K&S 4523AD Wedge Bonder||Online||
Config:30 degree Al wedge, Deep Access Mode
|AML Wafer Bonder||Online||Config: graphite platen|
|Lithography||AB-M Contact Aligner||Online|
|YES III Vapor Prime Oven||Online|
|Solvent/Headway Spinner Bench||Online|
|Brewer Cee 100CB||Offline||
7/1/2020 – Geneva has shipped this back to the vendor. It looks unlikely that we will pay to have it fixed.
12/3/2019 – No one has been pushing on this tool, so I plan to leave it in limbo until we get a few other high priority purchases made, e.g. AMOD pump spares.
|Metrology||Ambios XP2||Online||3/22/2020 – Laser installed and tested.|
|Wetbenches||Acid Process Wetbench||Online|
|Oxidation Diffusion Wetbench||Online|
|Miscellaneous||ATV PEO 603||Online|
|Crest Ultrasonic Cleaner||Online|