Deposition

Equipment Associated Process(es)
Amod Evaporator Aluminum thin film
Chrome thin film
Gold thin film
Silicon Dioxide thin film
Titanium thin film
Angstrom Sputter System Aluminum thin filmChrome thin film
Gold thin film
Iron thin film
Permalloy thin film
Silicon Dioxide thin film
Titanium thin film
Modulab Evaporator Aluminum thin film

Etching

Equipment Associated Process(es)
Oxford ICP Cryogenic etch
March 1703
PVA Tepla Ion 10 O2 DescumR1 S1813 on Si ashing
R2 S1813 on Al Ashing
R3 S1813 on Si Descum
R4 S1813 on Al Descum

Packaging

Equipment Associated Process(es)
Microautomation 1006 dicing saw

Lithography

Equipment Associated Process(es)
AB-M contact aligner Shipley SPR 1813 exposure
YES III vapor prime oven HMDS coating
Solvent/Headway spinner bench Spin Coating

Lithography

Equipment Associated Process(es)
EMS Hotplate
Brewer Cee 100CB Spin Coating

Metrology

Equipment Associated Process(es)
Ambios XP2 Step Height thickness measurement
Nanospec 3000

Packaging

Equipment Associated Process(es)
K&S 4523AD wire bonder

Wetbenches

Equipment Associated Process(es)
Acid process wetbench
Oxidation diffusion wetbench RCA clean for oxidation/diffusion

Miscellaneous

Equipment Associated Process(es)
ATV PEO 603 Thermal Oxidation
MRL oxidation Thermal Oxidation
Crest ultrasonic cleaner