A user operating the EvoVac evaporator

A user looking through the EvoVac sight glass.

The EvoVac Evaporator is a highly versatile R&D deposition tool. It has a four pocket, 25 cc electron beam source, a thermal source, and a stage capable of reaching 500 C. In addition, it has a KRI ion source for ion beam assisted depositions, three process gases in two MFCs for reactive depositions, and a variable angle deposition stage for glancing angle depositions. The deposition software is capapable of creating recipes to do any or all of the advanced functions during any deposition.