Attached Documents: 

 

 

Equipment/Process Academic Industrial User Training
Processing Equipment
Angstrom Sputter $120 + $50 Setup $240 +$50 Setup $480
Amod Evaporator $120 + $50 Setup $240 +$50 Setup $480
ATV PEO-603 Furnace $120 $240 $300
Contact Aligner: ABM $120 $240 $360
Headway PWM32 $60 $120 $240
Modulab Evaporator $40 $80 $150 
MRL Oxidation Furnace $60 $120 $120
MRL Boron Diffusion Furnace $60 $120 $120
Oxford Plasmalab 100 ICP $150 $300 $400
Phosphorous Diffusion Furnace $60 $120 $120
Plasma Etcher: March 3124 $40 $80 $150
PVA Tepla Ion 10 $60 $120  $120
Spin Coater: Brewer Cee100CB $60 $120 $240
Wet Benches Included in usage fee Included in usage fee $150
Characterization Equipment
Stylus Profilometer: AMBIOS XP2 $60 $120 $150
Ellipsometer: Gaertner L116 $30 $60 $100
Packaging Equipment
K&S 4523AD Wedge Bonder (Au and Al wire available) $20/hr + 15¢/bond $40/hr + 15¢/bond $150
K&S 4124 gold ball bonder $20/hr + 15¢/bond $40/hr + 15¢/bond $150
Other
Lab Usage Fee $250 (monthly) $500 (monthly)  
Monthly Cap Rates $2500 / month $5000 / month  

Notes

  • Hourly equipment fee is based upon individual equipment. Time usage is billed in ½ hour increments.
  • Facility usage fee: $250/user/month for academic and $500/user/month for industrial.
  • Usage fee covers general lab access and consumables, basic wet processing, and characterization equipment.
  • Training fee – as stated in the above table, per individual equipment.
  • Technical assistance for equipment operation - $70/hr academic, $140/hr industrial.
  • User training charge is per individual and is not covered in the monthly cap.
  • Use of the evaporation and sputter system may include a setup charge if a target change is required. Target usage fees for Au and Pt will be applied.
  • Targets available at this time: Al, Cr, Au, Fe, Permalloy, SiO2, Ni, ITO
  • Characterization equipment includes metrology microscopes with Video/CCD camera mounts (Nikon Optiphot 150, Olympus Ergolux w/ reflective andtransmitted illumination)
  • Cap fees do not cover user training fees or technician time.
  • Safety training is required for all users prior to gaining access to the lab.