| Equipment/process |
Academic |
Industrial |
User Training1 |
| Processing Equipment |
| Angstrom Sputter2 |
$120 + $50 setup |
$240 + $50 setup |
$480.00 |
| Angstron Amod evaporator2 |
$120 + $50 setup |
$240 + $50 setup |
$480.00 |
| Plasma etcher: March 3124 |
$40.00 |
$80.00 |
$150.00 |
| Oxford Plasmalab 100 ICP |
$150.00 |
$300.00 |
$400.00 |
| ATV PEO-603 furnace |
$120.00 |
$240.00 |
$300.00 |
| MRL Oxidation furnace: |
$60.00 |
$120.00 |
$120.00 |
| MRL Boron diffusion furnace: |
$60.00 |
$120.00 |
$120.00 |
| Phosphorous diffusion furnace: |
$60.00 |
$120.00 |
$120.00 |
| Contact aligner: ABM |
$120.00 |
$240.00 |
$360.00 |
| Spin Coater: Brewer Cee100CB |
$60.00 |
$120.00 |
$240.00 |
| Headway PWM32 |
$60.00 |
$120.00 |
$240.00 |
| Wet Processing |
Included in facility usage fee |
| Characterization Equipment |
| Stylus Profilometer: AMBIOS XP2 |
$60.00 |
$120.00 |
$150.00 |
| Ellipsometer: Gaertner L116 |
$30.00 |
$60.00 |
$100.00 |
| Packaging Equipment |
| K&S 4523AD wedge bonder Au and Al wire available |
$20/hr + 15¢/bond |
$40/hr + 15¢/bond |
$150.00 |
| K&S 4124 gold ball bonder |
$20/hr + 15¢/bond |
$40/hr + 15¢/bond |
$150.00 |
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| Lab Usage Fee |
$250 (monthly) |
$500 (monthly) |
| Monthly Cap rates3 |
$2500 / month |
$5000 / month |
- Hourly equipment fee based upon individual equipment. Time usage is billed in ½ hourincrements.
- Facility usage fee - $200/user/month for academic. $400/user/month for industrial
- Usage fee covers general lab access and consumables, basic wet processing, characterization equipment.
- Training fee – as stated in the above table per individual equipment
- Technical assistance for equipment operation - $70/hr academic $140/hr industrial
- User training charge is per individual and is not covered in the monthly cap.
- Use of the evaporation and sputter system may include a setup charge if a target change is required. Target usage fees for Au and Pt will be applied.
- Targets available at this time: Al, Cr, Au, Fe, Permalloy, SiO2, Ni, ITO
- Characterization equipment includes metrology microscopes with Video/CCD camera mounts (Nikon Optiphot 150, Olympus Ergolux w/ reflective andtransmitted illumination)
- Cap fees do not cover user training fees or technician time.
- Safety training is required for all users prior to gaining access to the lab.
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