Lithium Niobate Dry Etch Recipe
- The Oxford Plasmalab ICP 100 uses CHF3, oxygen and argon to etch lithium niobate.
- The etch rate seems to vary significantly but was measured at about 20 nm/min.
- As etch time increases the etch seems to slow as a passivation layer is formed on the lithium niobate sample.
- Lithium Niobate Etch Recipe.pdf